Proportional Pressure Valve

The proportional pressure valve uses piezo elements and semiconductor sensors. According to the adjustment of the electrical proportional signal, it can achieve stepless control of the outlet gas pressure with high-precision, high-response, and no noise.

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• FLT Series
• PPC Series

Proportional Flow Valve

The flow proportional valve uses piezoelectric elements and semiconductor sensors. According to the adjustment of the electrical proportional signal, it can achieve continuous control of the outlet gas flow with high-precision, high-response, and no noise.

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Proportional Flow Valve

The proportional flow valve uses piezo elements and semiconductor sensors. According to the adjustment of the electrical proportional signal, it can achieve continuous control of the outlet gas flow with high-precision, high-response, and no noise.

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Mass Flow Device

The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.

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Mass Flow Device

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